日本Engis光學平鏡組

日本Engis光學平鏡組(FMD)取代氦光單色燈
之新式光學平鏡組，一般可用來檢驗研磨拋光
加工後之工件，若是工件表面太粗糙，有可能
無法檢驗。
日本Engis光學平鏡組是採用綠光單色燈，可以
在光學平鏡上清晰地顯示干涉條紋。
光學平鏡之平面精度有0.1um 及 0.05um

Hyprez Uuilamp systems are the most
advanced optical flatness measuring
devices which replace the old helium
lapm systems. A green light
(wave length 546.1nm) backs up the
HYPREZ Optical Flat and clear image
of the fringe spectraof interference is
displayed on a mirror surface.
Clear photos (ASA400) of fringe spectra
can be taken. Available in two qualities
0.1µm & 0.05µm.